Patent Assignment
Reel/Frame 032554/0114
Assignment of Assignor's Interest
Recorded: 2014-03-28
Pages: 6
Assignors
NAKAJIMA, SHIGERU
Executed: 2014-03-24
SHIMA, HIROMI
Executed: 2014-03-24
TACHINO, YUSUKE
Executed: 2014-03-24
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Controlling Gas Supply Apparatus and Substrate Processing System