Assignment of Assignor's Interest

Recorded: 2014-03-28 Pages: 7

Assignors

YANAI, HIDEHIRO

Executed: 2014-02-26

ASHIHARA, HIROSHI

Executed: 2014-02-26

SANO, ATSUSHI

Executed: 2014-02-27

TAKASAKI, TADASHI

Executed: 2014-02-26

Assignee

HITACHI KOKUSAI ELECTRIC INC.

14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN

Covered Property (1)

Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device

Patent: 8,986,450 →

Application: 14/229,151 →

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.