Patent Assignment
Reel/Frame 032591/0758
Assignment of Assignor's Interest
Recorded: 2014-04-03
Pages: 3
Assignors
CHANG, SHIH-MING
Executed: 2014-03-21
LEE, CHIEN-FU
Executed: 2014-03-21
NG, HOI-TOU
Executed: 2014-03-21
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Systems and Methods for Improving Pattern Transfer