Patent Assignment
Reel/Frame 032620/0276
Assignment of Assignor's Interest
Recorded: 2014-04-07
Pages: 4
Assignors
TAKEBAYASHI, YUJI
Executed: 2014-03-13
SHIMADA, MASAKAZU
Executed: 2014-03-13
MORIKAWA, ATSUSHI
Executed: 2014-03-13
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.