Patent Assignment
Reel/Frame 032620/0314
Assignment of Assignor's Interest
Recorded: 2014-04-07
Pages: 2
Assignors
KAKUTA, KAZUYUKI
Executed: 2014-04-03
ONOZUKA, TOSHIHIKO
Executed: 2014-03-26
MATSUI, SHIGERU
Executed: 2014-03-27
EBATA, YOSHISADA
Executed: 2014-03-27
HASEGAWA, NORIO
Executed: 2014-03-28
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-8717, JAPAN
Covered Property
(1)
Phase Shift Mask, Method of Forming Asymmetric Pattern, Method of Manufacturing Diffraction Grating, and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.