Patent Assignment
Reel/Frame 032634/0137
Assignment of Assignor's Interest
Recorded: 2014-04-09
Pages: 2
Assignor
HIROKI, TSUTOMU
Executed: 2014-03-20
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method