Patent Assignment
Reel/Frame 032635/0217
Assignment of Assignor's Interest
Recorded: 2014-04-09
Pages: 4
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Technique for Temperature Measurement and Calibration of Semiconductor Workpieces Using Infrared