Patent Assignment
Reel/Frame 032653/0316
Assignment of Assignor's Interest
Recorded: 2014-04-11
Pages: 3
Assignor
RATHSACK, BENJAMEN M.
Executed: 2014-03-07
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Multi-Step Bake Apparatus and Method for Directed Self-Assembly Lithography Control