Assignment of Assignor's Interest

Recorded: 2014-04-14 Pages: 3

Assignors

RALEY, ANGELIQUE D.

Executed: 2014-03-13

O'MEARA, DAVID L.

Executed: 2014-03-14

Assignee

TOKYO ELECTRON LIMITED

3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN

Covered Property (1)

Spacer Material Modification to Improve K-Value and Etch Properties

Patent: 9,171,736 →

Application: 14/195,099 →

Publication: US 2015/0249017