Patent Assignment
Reel/Frame 032725/0194
Assignment of Assignor's Interest
Recorded: 2014-04-22
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Etching Film Containing Cobalt and Palladium