Patent Assignment
Reel/Frame 032725/0976
Assignment of Assignor's Interest
Recorded: 2014-04-22
Pages: 5
Assignors
HOFMANN, THORSTEN
Executed: 2014-03-24
BRET, TRISTAN
Executed: 2014-03-28
SPIES, PETRA
Executed: 2014-04-10
AUTH, NICOLE
Executed: 2014-03-24
BUDACH, MICHAEL
Executed: 2014-03-24
CUJAS, DAJANA
Executed: 2014-03-24
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, 07745 JENA, GERMANY
Covered Property
(1)
Method and Apparatus for Protecting a Substrate During Processing by a Particle Beam
Application:
14/200,264 →
Publication:
US 2014/0255831
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.