Patent Assignment
Reel/Frame 032730/0238
Assignment of Assignor's Interest
Recorded: 2014-04-22
Pages: 5
Assignors
TANITSU, OSAMU
Executed: 2014-03-25
TANAKA, HIROHISA
Executed: 2014-03-14
KATO, KINYA
Executed: 2014-03-18
MORI, TAKASHI
Executed: 2014-03-18
Assignee
NIKON CORPORATION
12-1, YURAKUCHO 1-CHOME, CHIYODA-KU, TOKYO, 100-8331, JAPAN
Covered Property
(1)
Illumination Optical System, Exposure Apparatus, Device Production Method, and Light Polarization Unit