Patent Assignment
Reel/Frame 032732/0332
Assignment of Assignor's Interest
Recorded: 2014-04-23
Pages: 3
Assignor
TERASHIMA, SHIGERU
Executed: 2013-09-13
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Supply Apparatus Which Supplies Radicals, Lithography Apparatus, and Method of Manufacturing Article