Patent Assignment
Reel/Frame 032740/0128
Assignment of Assignor's Interest
Recorded: 2014-04-23
Pages: 12
Assignors
YOKOYAMA, TOSHIO
Executed: 2014-04-10
MIYAZAKI, MITSURU
Executed: 2014-04-10
KUNISAWA, JUNJI
Executed: 2014-04-10
TOYOMURA, NAOKI
Executed: 2014-04-10
HOMBO, TERUAKI
Executed: 2014-04-10
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Processed Substrate Manufacturing Method