Patent Assignment
Reel/Frame 032760/0154
Assignment of Assignor's Interest
Recorded: 2014-04-25
Pages: 3
Assignors
SUN, JENNIFER Y.
Executed: 2014-03-04
KANUNGO, BIRAJA P.
Executed: 2014-02-26
FIROUZDOR, VAHID
Executed: 2014-02-26
ZHANG, YING
Executed: 2014-03-04
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Ion Assisted Deposition for Rare-Earth Oxide Based Coatings on Lids and Nozzles