Patent Assignment
Reel/Frame 032766/0402
Assignment of Assignor's Interest
Recorded: 2014-04-28
Pages: 3
Assignors
YASUMOTO, SEIJI
Executed: 2014-04-09
SATO, MASATAKA
Executed: 2014-04-09
EGUCHI, SHINGO
Executed: 2014-04-17
SUZUKI, KUNIHIKO
Executed: 2014-04-17
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Peeling Method, Semiconductor Device, and Peeling Apparatus