Patent Assignment
Reel/Frame 032779/0906
Assignment of Assignor's Interest
Recorded: 2014-04-29
Pages: 7
Assignors
CHEN, LI-MIN
Executed: 2013-07-31
JENQ, SHRANE NING
Executed: 2013-07-29
BOGGS, KARL E.
Executed: 2013-07-26
LIU, JUN
Executed: 2013-07-26
THOMAS, NICOLE
Executed: 2013-08-21
Assignee
ADVANCED TECHNOLOGY MATERIALS, INC.
7 COMMERCE DRIVE, DANBURY, CONNECTICUT, 06810
Covered Property
(1)
Aqueous Clean Solution with Low Copper Etch Rate for Galvanic Ruthenium/Copper Corrosion Improvement
Application:
61/695,548 →