IP Library › Patent Application 61695548
Patent Application Provisional
App. No. 61/695,548 · Confirmation No. 6228

AQUEOUS CLEAN SOLUTION WITH LOW COPPER ETCH RATE FOR GALVANIC RUTHENIUM/COPPER CORROSION IMPROVEMENT

Provisional Application Expired
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 Code Description Pages PDF
2013-04-11 PET.STATUS Petition for review/processing depending on status 2 View
2013-04-11 TR.PROV Provisional Cover Sheet (SB16) 4 View
2013-04-11 WFEE Fee Worksheet (SB06) 2 View
2013-04-11 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-09-25 APP.FILE.REC Filing Receipt 3 View
2012-09-25 M327 Miscellaneous Communication to Applicant - No Action Count 1 View
2012-09-20 TRAN.LET Transmittal Letter 2 View
2012-09-20 TR.PROV Provisional Cover Sheet (SB16) 4 View
2012-09-20 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-08-31 TR.PROV Provisional Cover Sheet (SB16) 4 View
2012-08-31 SPEC Specification 14 View
2012-08-31 CLM Claims 4 View
2012-08-31 ABST Abstract 1 View
2012-08-31 WFEE Fee Worksheet (SB06) 2 View
2012-08-31 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
61/695,548
Filed
2012-08-31