Patent Assignment
Reel/Frame 032783/0156
Assignment of Assignor's Interest
Recorded: 2014-04-29
Pages: 3
Assignor
VAN DER WILT, PAUL
Executed: 2014-04-14
Assignee
COHERENT LASERSYSTEMS GMBH & CO. KG
HANS-BÖCKLER-STRASSE 12, GÖTTINGEN, D-37079, GERMANY
Covered Property
(1)
Monitoring Method and Apparatus for Control of Excimer Laser Annealing