Patent Assignment
Reel/Frame 032791/0073
Assignment of Assignor's Interest
Recorded: 2014-04-30
Pages: 5
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Patent:
9,018,689 →
Application:
14/230,513 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.