Patent Assignment
Reel/Frame 032797/0282
Assignment of Assignor's Interest
Recorded: 2014-05-01
Pages: 3
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Systems, Methods and Apparatus for Post-Chemical Mechanical Planarization Substrate Cleaning