Patent Assignment
Reel/Frame 032809/0166
Assignment of Assignor's Interest
Recorded: 2014-05-02
Pages: 3
Assignor
ISHIBASHI, TOMOATSU
Executed: 2014-04-25
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Substrate Cleaning Apparatus