Assignment of Assignor's Interest

Recorded: 2014-05-05 Pages: 6

Assignors

LANGE, STEVEN R.

Executed: 2014-03-31

DANEN, ROBERT M.

Executed: 2014-03-28

PALOMBA, STEFANO

Executed: 2014-04-02

Assignee

KLA-TENCOR CORPORATION

ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035

Covered Properties (2)

Apparatus and Methods for Determining Defect Depths in Vertical Stack Memory

Patent: 9,696,264 →

Application: 14/226,745 →

Publication: US 2014/0300890

Detection and Classification Method for Defects Buried in a 3D Stack Based on Near Infrared (NIR) Scanning Confocal System

Application: 61/807,753 →