Patent Assignment
Reel/Frame 032831/0963
Assignment of Assignor's Interest
Recorded: 2014-05-06
Pages: 5
Assignors
KANG, HU
Executed: 2014-05-05
SWAMINATHAN, SHANKAR
Executed: 2014-04-16
QIAN, JUN
Executed: 2014-04-23
KIM, WANKI
Executed: 2014-02-27
HAUSMANN, DENNIS
Executed: 2014-04-16
VAN SCHRAVENDIJK, BART J.
Executed: 2014-04-16
LAVOIE, ADRIEN
Executed: 2014-04-16
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Gapfill of Variable Aspect Ratio Features with a Composite Peald and Pecvd Method