Patent Assignment
Reel/Frame 032857/0307
Assignment of Assignor's Interest
Recorded: 2014-05-09
Pages: 3
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus Including Spin Chuck
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.