Patent Assignment
Reel/Frame 032857/0747
Assignment of Assignor's Interest
Recorded: 2014-05-09
Pages: 6
Assignors
BOYD, WENDELL GLEN, JR.
Executed: 2014-05-06
PARKHE, VIJAY D.
Executed: 2014-05-06
BUSCHE, MATTHEW JAMES
Executed: 2014-05-06
MAKHRATCHEV, KONSTANTIN
Executed: 2014-05-04
ONO, MASANORI
Executed: 2014-05-07
THACH, SEHN
Executed: 2014-05-06
Assignee
APPLIED MATERIALS INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Control Systems Employing Deflection Sensors to Control Clamping Forces Applied by Electrostatic Chucks, and Related Methods