Patent Assignment
Reel/Frame 032877/0557
Assignment of Assignor's Interest
Recorded: 2014-05-13
Pages: 5
Assignors
VERGOHL, MICHAEL
Executed: 2014-03-31
RADEMACHER, DANIEL
Executed: 2014-03-31
KRICHELDORF, HANS-ULRICH
Executed: 2014-03-31
BRAUER, GUNTER
Executed: 2014-03-31
Assignee
FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
HANSASTRASSE 27C, MUNCHEN, 80686, GERMANY
Covered Property
(1)
Method and Apparatus for Producing Low-Particle Layers on Substrates