Patent Assignment
Reel/Frame 032877/0860
Assignment of Assignor's Interest
Recorded: 2014-05-13
Pages: 9
Assignors
LIU, WEN-KUEI
Executed: 2014-05-06
TSAI, TENG-CHUN
Executed: 2014-05-08
LIAO, KAO-FENG
Executed: 2014-05-08
YEN, YU-TING
Executed: 2014-05-08
SU, YU-CHUNG
Executed: 2014-05-08
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Cmp-Friendly Coatings for Planar Recessing or Removing of Variable-Height Layers