Patent Assignment
Reel/Frame 032901/0787
Assignment of Assignor's Interest
Recorded: 2014-05-15
Pages: 3
Assignor
YAMAZAKI, SHUNPEI
Executed: 2014-04-30
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Oxide Semiconductor Film, Method for Forming Oxide Semiconductor Film, and Semiconductor Device