Patent Assignment
Reel/Frame 032919/0771
Assignment of Assignor's Interest
Recorded: 2014-05-19
Pages: 3
Assignors
HAMAYA, ZENICHI
Executed: 2014-01-21
TAKAI, RYO
Executed: 2014-01-21
HIRAI, SHINICHIRO
Executed: 2014-01-21
ROKUKAWA, TAKESHI
Executed: 2014-01-22
MIURA, TAKASHI
Executed: 2014-01-22
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Interferometer System, Lithography Apparatus, and Article Manufacturing Method