Patent Assignment
Reel/Frame 032923/0684
Assignment of Assignor's Interest
Recorded: 2014-05-19
Pages: 6
Assignors
BEZEL, ILYA
Executed: 2014-03-07
SHCHEMELININ, ANATOLY
Executed: 2014-03-07
SALNIK, ALEX
Executed: 2014-03-17
CHIMMALGI, ANANT
Executed: 2014-05-06
Assignee
KLA-TENCOR CORPORATION, A
1 TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Gas Refraction Compensation for Laser-Sustained Plasma Bulbs