Patent Assignment
Reel/Frame 032931/0084
Assignment of Assignor's Interest
Recorded: 2014-05-20
Pages: 6
Assignors
TAKAHASHI, KIICHI
Executed: 2014-05-16
KOBAYASHI, TAKESHI
Executed: 2014-05-16
TAKABATAKE, YUJI
Executed: 2014-05-16
ITO, NAOHIDE
Executed: 2014-05-16
SUGAWARA, KATSUAKI
Executed: 2014-05-16
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Ready for Rotation State Detection Device, Method of Detecting Ready for Rotation State and Substrate Processing Apparatus