Patent Assignment
Reel/Frame 032937/0795
Assignment of Assignor's Interest
Recorded: 2014-05-21
Pages: 4
Assignors
OOKOUCHI, ATSUSHI
Executed: 2014-05-12
YOSHIHARA, KOUSUKE
Executed: 2014-05-12
ICHINOMIYA, HIROSHI
Executed: 2014-05-12
NISIHATA, HIROSI
Executed: 2014-05-12
NAITOU, RYOUICHIROU
Executed: 2014-05-12
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Cleaning Apparatus, Substrate Cleaning Method and Non-Transitory Storage Medium