Patent Assignment
Reel/Frame 032955/0060
Assignment of Assignor's Interest
Recorded: 2014-05-23
Pages: 7
Assignors
MIZUTANI, TAKU
Executed: 2014-05-09
NAMIOKA, ICHIRO
Executed: 2014-05-09
IIJIMA, TOSHIHIKO
Executed: 2014-05-09
TODATE, SHIGENORI
Executed: 2014-05-13
ITO, TAKAHIRO
Executed: 2014-05-14
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Processing Device Group Controller, Manufacturing Process System, Processing Device Group Control Method, Manufacturing Optimization System, Manufacturing Optimization Device, and Manufacturing Optimization Method