Patent Assignment
Reel/Frame 032958/0883
Assignment of Assignor's Interest
Recorded: 2014-05-23
Pages: 4
Assignors
SCHMITT-WEAVER, EMIL PETER
Executed: 2014-03-05
LUEHRMANN, PAUL FRANK
Executed: 2014-03-06
HENKE, WOLFGANG
Executed: 2014-03-05
KEA, MARC JURIAN
Executed: 2014-03-05
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Method of Calibrating a Lithographic Apparatus, Device Manufacturing Method and Associated Data Processing Apparatus and Computer Program Product