Patent Assignment
Reel/Frame 032960/0010
Assignment of Assignor's Interest
Recorded: 2014-05-23
Pages: 2
Assignors
CHEN, CHIEN-CHIH
Executed: 2014-03-18
WU, CHENG-HAN
Executed: 2014-03-18
CHANG, CHING-YU
Executed: 2014-03-18
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Photoresist System and Method