Patent Assignment
Reel/Frame 032966/0599
Assignment of Assignor's Interest
Recorded: 2014-05-27
Pages: 6
Assignors
KIM, YUNSANG
Executed: 2014-05-22
CHATTOPADHYAY, KAUSHIK
Executed: 2014-05-22
SEXTON, GREGORY
Executed: 2014-05-22
HONG, YOUN GI
Executed: 2014-05-22
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Back Side Deposition Apparatus and Applications