Patent Assignment
Reel/Frame 032987/0094
Assignment of Assignor's Interest
Recorded: 2014-05-29
Pages: 3
Assignor
NAKAMURA, TOORU
Executed: 2014-05-21
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Liquid Treatment Apparatus Including Return Path and Switching Mechanism