Patent Assignment
Reel/Frame 033017/0569
Merger
Recorded: 2014-06-03
Pages: 23
Assignor
CYMER, INC.
Executed: 2013-05-30
Assignee
CYMER, LLC
17075 THORNMINT COURT, INTELLECTUAL PROP DEPT MS/4-2D, SAN DIEGO, CALIFORNIA, 92127
Covered Property
(1)
Systems and Methods for Implementing an Interaction Between a Laser Shaped as Line Beam and a Film Deposited on a Substrate