Patent Assignment
Reel/Frame 033018/0457
Assignment of Assignor's Interest
Recorded: 2014-06-03
Pages: 6
Assignors
KAMP, TOM
Executed: 2014-05-27
SATO, ARTHUR
Executed: 2014-06-02
PATERSON, ALEX
Executed: 2014-05-27
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Systems and Methods for Improving Wafer Etch Non-Uniformity When Using Transformer-Coupled Plasma