Patent Assignment
Reel/Frame 033019/0102
Assignment of Assignor's Interest
Recorded: 2014-06-03
Pages: 3
Assignor
YAMAZAKI, SHUNPEI
Executed: 2014-05-22
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Oxide Semiconductor Film and Formation Method Thereof