Patent Assignment
Reel/Frame 033056/0453
Assignment of Assignor's Interest
Recorded: 2014-06-09
Pages: 3
Assignors
PAK, SAMUEL S.
Executed: 2014-06-02
YANG, HYOSEOK
Executed: 2014-06-02
LEE, SANG IN
Executed: 2014-06-05
Assignee
VEECO ALD INC.
3191 LAURELVIEW COURT, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Performing Atomic Layer Deposition on Large Substrate Using Scanning Reactors
Application:
14/298,654 →
Publication:
US 2014/0366804