Patent Assignment
Reel/Frame 033058/0011
Assignment of Assignor's Interest
Recorded: 2014-06-09
Pages: 6
Assignors
NGUYEN, ANDREW
Executed: 2014-05-27
RAMASWAMY, KARTIK
Executed: 2014-05-27
KENNEY, JASON A
Executed: 2014-05-28
RAUF, SHAHID
Executed: 2014-05-28
COLLINS, KENNETH S
Executed: 2014-05-28
YANG, YANG
Executed: 2014-05-27
LANE, STEVEN
Executed: 2014-05-27
VISHWANATH, YOGANANDA SARODE
Executed: 2014-05-21
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Symmetrical Inductively Coupled Plasma Source with Side Rf Feeds and Spiral Coil Antenna