Patent Assignment
Reel/Frame 033070/0522
Assignment of Assignor's Interest
Recorded: 2014-06-10
Pages: 6
Assignors
BACKUES, MARK
Executed: 2014-06-09
AOYAGI, PAUL
Executed: 2014-06-09
POSLAVSKY, LEONID
Executed: 2014-06-06
Assignees
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Automatic Determination of Fourier Harmonic Order for Computation of Spectral Information for Diffraction Structures
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.