Patent Assignment
Reel/Frame 033074/0667
Assignment of Assignor's Interest
Recorded: 2014-06-11
Pages: 3
Assignors
LIN, CHUNG-HSIEN
Executed: 2014-04-03
CHU, CHIA-HUA
Executed: 2014-04-03
CHENG, CHUN-WEN
Executed: 2014-04-03
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Mems Device with Release Aperture