Patent Assignment
Reel/Frame 033094/0756
Assignment of Assignor's Interest
Recorded: 2014-06-13
Pages: 2
Assignors
ASAKURA, RYOJI
Executed: 2014-04-24
TAMAKI, KENJI
Executed: 2014-05-12
KAGOSHIMA, AKIRA
Executed: 2014-04-28
SHIRAISHI, DAISUKE
Executed: 2014-04-28
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Analysis Method and Semiconductor Etching Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.