Patent Assignment
Reel/Frame 033110/0097
Assignment of Assignor's Interest
Recorded: 2014-06-16
Pages: 6
Assignors
SANO, ATSUSHI
Executed: 2014-06-09
HIROSE, YOSHIRO
Executed: 2014-06-09
KAMAKURA, TSUKASA
Executed: 2014-06-09
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.