Patent Assignment
Reel/Frame 033114/0897
Assignment of Assignor's Interest
Recorded: 2014-06-17
Pages: 5
Assignors
AUGUSTYNIAK, EDWARD
Executed: 2014-06-03
RAMSAYER, CHRISTOPHER JAMES
Executed: 2014-06-03
SINGHAL, AKHIL N.
Executed: 2014-06-06
BOUMATAR, KAREEM
Executed: 2014-06-03
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Defect Control in Rf Plasma Substrate Processing Systems Using Dc Bias Voltage During Movement of Substrates