Patent Assignment
Reel/Frame 033118/0432
Assignment of Assignor's Interest
Recorded: 2014-06-17
Pages: 4
Assignors
WANG, LAN-HAI
Executed: 2014-05-30
YANG, YONG-HUNG
Executed: 2014-05-30
LIU, DING-I
Executed: 2014-05-30
LIAO, SI-WEN
Executed: 2014-05-30
LEU, PO-HSIUNG
Executed: 2014-05-30
LIN, MAO-CHENG
Executed: 2014-05-30
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
NO.8, LI-HSIN ROAD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Coating Apparatus and Method of Forming Coating Film