Patent Assignment
Reel/Frame 033121/0715
Assignment of Assignor's Interest
Recorded: 2014-06-17
Pages: 3
Assignors
WALDMANN, OLE
Executed: 2014-06-11
PAPE, ERIC A.
Executed: 2014-06-11
GAFF, KEITH WILLIAM
Executed: 2014-06-11
SINGH, HARMEET
Executed: 2014-06-11
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Auto-Correction of Malfunctioning Thermal Control Element in a Temperature Control Plate of a Semiconductor Substrate Support Assembly That Includes Deactivating the Malfunctioning Thermal Control Element and Modifying a Power Level of at Least One Functioning Thermal Control Element